Nano Lithography
eBook - ePub

Nano Lithography

  1. English
  2. ePUB (mobile friendly)
  3. Available on iOS & Android
eBook - ePub

Nano Lithography

Book details
Table of contents
Citations

About This Book

Lithography is an extremely complex tool – based on the concept of "imprinting" an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields.

Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures ? meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS).
This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography.

It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.

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Yes, you can access Nano Lithography by Stefan Landis in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Microelectronics. We have over one million books available in our catalogue for you to explore.

Information

Publisher
Wiley-ISTE
Year
2013
ISBN
9781118621707
Edition
1
Topic
Technology & Engineering
Subtopic
Microelectronics
Index
Technology & Engineering

Table of contents

  1. Cover
  2. Title Page
  3. Copyright
  4. Foreword
  5. Introduction
  6. Chapter 1: X-ray Lithography: Fundamentals and Applications
  7. Chapter 2: NanoImprint Lithography
  8. Chapter 3: Lithography Techniques Using Scanning Probe Microscopy
  9. Chapter 4: Lithography and Manipulation Based on the Optical Properties of Metal Nanostructures
  10. Chapter 5: Patterning with Self-Assembling Block Copolymers
  11. Chapter 6: Metrology for Lithography
  12. List of Authors
  13. Index