Optical Inspection of Microsystems, Second Edition
eBook - ePub

Optical Inspection of Microsystems, Second Edition

  1. 570 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Optical Inspection of Microsystems, Second Edition

Book details
Table of contents
Citations

About This Book

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts.

Supplying effective tools for increased quality and reliability, this book



  • Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems



  • Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques



  • Offers numerous practical examples and illustrations



  • Includes calibration of optical measurement systems for the inspection of MEMS



  • Presents the characterization of dynamics of MEMS

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Information

Publisher
CRC Press
Year
2019
ISBN
9780429532658
Edition
2
Topic
Physical Sciences
Subtopic
Mechanics

Table of contents

  1. Cover
  2. Half Title
  3. Title Page
  4. Copyright Page
  5. Table of Contents
  6. Preface to Second Edition
  7. Preface to First Edition
  8. Editor
  9. Contributors
  10. Chapter 1 Image Processing and Computer Vision for MEMS Testing
  11. Chapter 2 Surface Features
  12. Chapter 3 A Metrological Characteristics Approach to Uncertainty in Surface Metrology
  13. Chapter 4 Image Correlation Techniques for Microsystems Inspection
  14. Chapter 5 Light Scattering Techniques for the Inspection of Microcomponents and Structures
  15. Chapter 6 Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)
  16. Chapter 7 Optical Profiling Techniques for MEMS Measurement
  17. Chapter 8 Grid and Moiré Methods for Micromeasurements
  18. Chapter 9 Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents
  19. Chapter 10 Interference Microscopy Techniques for Microsystem Characterization
  20. Chapter 11 Measuring MEMS in Motion by Laser Doppler Vibrometry
  21. Chapter 12 An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS
  22. Chapter 13 Optoelectronic Holography for Testing Electronic Packaging and MEMS
  23. Chapter 14 Digital Holography and Its Application in MEMS/MOEMS Inspection
  24. Chapter 15 Speckle Metrology for Microsystem Inspection
  25. Chapter 16 Spectroscopic Techniques for MEMS Inspection
  26. Chapter 17 Sensor Fusion in Multiscale Inspection Systems
  27. Index