Micro Electro Mechanical System Design
eBook - PDF

Micro Electro Mechanical System Design

  1. 496 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Micro Electro Mechanical System Design

Book details
Table of contents
Citations

About This Book

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

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Yes, you can access Micro Electro Mechanical System Design by James J. Allen in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Microelectronics. We have over one million books available in our catalogue for you to explore.

Information

Publisher
CRC Press
Year
2005
ISBN
9781420027754
Edition
1
Topic
Technology & Engineering
Subtopic
Microelectronics
Index
Technology & Engineering

Table of contents

  1. Cover
  2. Half Title
  3. Title Page
  4. Copyright Page
  5. Dedication
  6. Preface
  7. Acknowledgments
  8. About the Author
  9. Table of Contents
  10. Chapter 1: Introduction
  11. Chapter 2: Fabrication Processes
  12. Chapter 3: MEMS Technologies
  13. Chapter 4: Scaling Issues for MEMS
  14. Chapter 5: Design Realization Tools for MEMS
  15. Chapter 6: Electromechanics
  16. Chapter 7: Modeling and Design
  17. Chapter 8: MEMS Sensors and Actuators
  18. Chapter 9: Packaging
  19. Chapter 10: Reliability
  20. Appendix A — Glossary
  21. Appendix B — Prefixes
  22. Appendix C — Micro–MKS Conversions
  23. Appendix D — Physical Constants
  24. Appendix E — Material Properties
  25. Appendix F — Stiffness Coefficients of Frequently Used MEMS Flexures
  26. Appendix G — Common MEMS Cross-Section Properties
  27. Appendix H
  28. Index