Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. The first volume, MEMS: Introduction and Fundamentals builds the required background and explores various physical considerations of MEMS. Topics include scaling, simulation models, the basics of control theory, and the physics of materials flow, thin liquid films, and bubble/drop transport. New chapters in this edition address lattice Boltzmann simulations and microscale hydrodynamics. Standing well on its own, this books builds an outstanding foundation for further exploration of MEMS and their applications.

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Yes, you can access MEMS by Mohamed Gad-el-Hak, Frank Kreith, Roop L. Mahajan in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Microelectronics. We have over one million books available in our catalogue for you to explore.

Information

Publisher

CRC Press

Year

2005

ISBN

9781420036572

Edition

Topic

Technology & Engineering

Subtopic

Microelectronics

Index

Technology & Engineering

Front cover
Preface
Editor-in-Chief
Contributors
Table of Contents
Introduction
Scaling of Micromechanical Devices
Mechanical Properties of MEMS Materials
Flow Physics
Integrated Simulation for MEMS: Coupling Flow-Structure- Thermal-Electrical Domains
Molecular-Based Microfluidic Simulation Models
Hydrodynamics of Small-Scale Internal Gaseous Flows
Burnett Simulations of Flows in Microdevices
Lattice Boltzmann Simulations of Slip Flow in Microchannels
Liquid Flows in Microchannels
Lubrication in MEMS
Physics of Thin Liquid Films
Bubble/Drop Transport in Microchannels
Fundamentals of Control Theory
Model-Based Flow Control for Distributed Architectures
Soft Computing in Control
Index
Back cover