Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
eBook - PDF

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

  1. 72 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Book details
Table of contents
Citations

About This Book

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

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Yes, you can access Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan in PDF and/or ePUB format, as well as other popular books in Sciences physiques & Physique. We have over one million books available in our catalogue for you to explore.

Information

Publisher
CRC Press
Year
2002
ISBN
9781482269680
Edition
1
Topic
Sciences physiques
Subtopic
Physique

Table of contents

  1. Cover
  2. Half Title
  3. Title Page
  4. Copyright Page
  5. Dedication
  6. Foreword
  7. Preface to the Second Edition
  8. Preface to the First Edition
  9. Contributors
  10. Table of Contents
  11. Recent Changes in the Semiconductor Industry
  12. 1: Deposition Technologies and Applications: Introduction and Overview
  13. 2: Silicon Epitaxy by Chemical Vapor Deposition
  14. 3: Chemical Vapor Deposition of Silicon Dioxide Films
  15. 4: Metal Organic Chemical Vapor Deposition: Technology and Equipment
  16. 5: Featute Scale Modeling
  17. 6: The Role Of Metrology And Inspection In Semiconductor Processing
  18. 7: Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing
  19. 8: Sputtering and Sputter Deposition
  20. 9: Laser and Electron Beam Assisted Processing
  21. 10: Molecular Beam Epitaxy: Equipment and Practice
  22. 11: Ion Beam Deposition
  23. 12: Chemical Mechanical Polishing
  24. 13: Organic Dielectrics in Multilevel Metallization of Integrated Circuits
  25. 14: Performance, Processing, and Lithography Trends
  26. Index