Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques

Volume 11

Rajiv Kohli, K.L. Mittal

• Publisher: Elsevier
• Year: 2018
• Print ISBN:
  9780128155776
• eBook ISBN:
  9780128155783
• Topic: Technology & Engineering
• Subtopic: Materials Science
• Index: Technology & Engineering

Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques, Volume Eleven, part of the Developments in Surface Contamination and Cleaning series, provides a guide to recent advances in the application of cleaning techniques for the removal of surface contamination in various industries, such as aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. The material in this new edition compiles cleaning applications into one easy reference that has been fully updated to incorporate new applications and techniques. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. - Presents the latest reviewed technical information on precision cleaning applications as written by established experts in the field - Provides a single source on the applications of innovative precision cleaning techniques for a wide variety of industries - Serves as a guide to the selection of precision cleaning techniques for specific applications

Chapter 1

Fundamentals and Applications of Sonic Technology

Dinesh P.R. Thanu^⁎; Mingrui Zhao^†; Zhenxing Han^‡; Manish Keswani^{⁎ ⁎} Materials Science and Engineering, University of Arizona, Tucson, AZ, USA
^† Applied Materials, Santa Clara, CA, USA
^‡ Micron Technology Inc., Boise, ID, USA

Abstract

With the advancement in technology, contaminant removal has become an important factor in many industries. This includes semiconductor, medical, marine biology, food processing, waste water purification, solar panel cleaning, textile industry, coal washing, optics and many other fields where defect-free surfaces are deemed necessary. Particulate surface contamination is one of the major causes of low yields and poor quality in these industries. Although many wet chemistries are available for effective cleaning, industrieshave a constant struggle to substitute the use of toxic solvent-based chemistries with environmentally-benign cleaning methods. Researchers have shown that ultrasonics and megasonics can effectively replace these wet chemistries and are now being extensively used in various industries and novel applications. This chapter reviews and summarizes past and current work on various acoustic cleaning applications and discusses the key aspects of cleaning fundamentals, mechanisms, advantages, and limitations.

Keywords

acoustic cavitation; acoustic streaming; cleaning; megasonics; particle removal; sonication; ultrasonics

Chapter Outline

• 1 Introduction
• 2 Fundamentals and Applications of Acoustic Cleaning
  • 2.1 Basics of Sonication and its Role in Particulate Removal
  • 2.2 Acoustic Cleaning History, Categories, and Advantages
  • 2.3 Mechanisms Involved in Acoustic Cleaning
• 3 Trending Applications of Sonic Technology
  • 3.1 Significance of Sonic Cleaning in the Microelectronics Industry
  • 3.2 Practice in Dentistry
  • 3.3 Use in Marine Biology
  • 3.4 Ultrasound Applications in the Food Industry
  • 3.5 Membrane Cleaning For Filtration Process
  • 3.6 Novel Applications
• 4 Contaminant and Particle Removal Using Acoustics
  • 4.1 Types of Contaminants
  • 4.2 Conventional Technologies for Particle Removal
  • 4.3 Removal of Micro and Nano-Sized Particles Using Acoustics
• 5 Summary
• References

1 Introduction

Removal of contaminants such as metals, organics, and particulates from physical surfaces requires an effective cleaning process [1–9]. In this regard, sonic technology has been predominantly used for decades in many industries. The use of ultrasonics for industrial cleaning began its ascent as early as the 1950s. Significant advancements have been made in this technology since then in a steady and effective manner and it is now well recognized throughout the world as an established cleaning process. Its development can be distinguished as evolutionary rather than revolutionary. Proof-of-concept and the science and engineering behind sonic technology had evolved in the early 1950s; however, the real advancements were made in this decade to establish this technology from laboratory level research to high volume manufacturing [10–15]. Many researchers have stated in their published papers that sonic irradiation in the frequency range of ultrasonics and megasonics can remove the surface contaminants by means of acoustic streaming and cavitation. A noteworthy advantage of using a controlled sonic technology for surface contaminant removal is due to its dramatic reduction in processing times compared to other cleaning technologies. Additionally, sonic technology offers a safe, affordable, and environmentally-friendly cleaning process without the requirement of any toxic solvents. One of the main challenges typically associated with the cleaning industry is the disposal of toxic waste which is harmful to human life and stands as a roadblock to the environment [16–19]. Sonic technology offers a huge benefit in this regard. Since its inception, sonic technology has become an enabling technology for surface cleaning in various industry sectors including microelectronics, medicine, marine biology, dairy processing, textile cleaning, coal washing, wastewater purification, corrosion protection, turbine engine filter cleaning, nanotechnology, vegetation purification, solar panel cleaning, and numerous specialized business areas. Two key acoustic techniques, namely megasonic and ultrasonic cleaning, are widely accepted in state-of-the-art commercial applications as viable cleaning options due to their versatility, low cost, efficacy, ease of operation, and green process credentials [10,13,15,20,21].

The use of acoustic energy for modifying chemical reaction pathways and industry yield has been well recognized and widely researched for many years. The limelight of acoustics for industrial cleaning applications came in the early 1970s and its resurgence to prominence came in the 2000s; however, not all forms of sound energy are effective at causing a physical and chemical change in a given medium. As a sound wave travels, it undergoes a cycle of compression and rarefaction which produces destructive effects only in a certain frequency range by means of acoustic streaming, shock waves, micro-jets, shear forces, and cavitation [12,14,15]. Sound energy is a complicated phenomenon with vital tuning parameters such as frequency, wavelength, intensity, velocity, and amplitude. Although frequency has been widely discussed as a key parameter in various publications, there are many factors modulating the efficiency of sonic cleaning. In this chapter, a comprehensive review of up-to-date applications of sonic technology for surface contaminant removal in various industrial sectors is described. Additionally, new technological fields with an added focus on key fundamental aspects such as sound principles, cleaning mechanism, advantages, limitations, and alternative methods are provided.

2 Fundamentals and applications of acoustic cleaning

The fundamental principle of acoustic cleaning is based on the use of hig...

Table of contents

• Cover image
• Title page
• Table of Contents
• Copyright
• Contributors
• Preface
• About the Editors
• Chapter 1: Fundamentals and Applications of Sonic Technology
• Chapter 2: Applications of Strippable Coatings for Removal of Surface Contaminants
• Chapter 3: Carbon Dioxide Snow Cleaning Applications
• Chapter 4: Applications of Solid Carbon Dioxide (Dry Ice) Pellet Blasting for Removal of Surface Contaminants
• Chapter 5: Applications of Liquid Carbon Dioxide for Removal of Surface Contamination
• Chapter 6: Applications of Supercritical Carbon Dioxide for Removal of Surface Contaminants
• Chapter 7: Applications of Laser Cleaning Process in High Value Manufacturing Industries
• Chapter 8: Fundamentals and Applications of Plasma Cleaning
• Chapter 9: Applications of UV-Ozone Cleaning Technique for Removal of Surface Contaminants
• Chapter 10: Electrostatic Removal and Manipulation of Small Particles and Surface Cleaning Applications
• Chapter 11: Applications of Gas-Phase Cleaning for Removal of Surface Contaminants
• Chapter 12: Cleaning Applications Using a High-Speed Impinging Air Jet
• Chapter 13: Microabrasive Technology for Precision Cleaning and Processing Applications
• Chapter 14: Cleanroom Wiper Applications for Removal of Surface Contamination
• Chapter 15: Application of Microbial Cleaning Technology for Removal of Surface Contamination
• Chapter 16: Applications of Ionic Liquids in Removal of Surface Contaminants
• Chapter 17: Applications of Dry Vapor Steam Cleaning Technique for Removal of Surface Contaminants
• Chapter 18: Applications of Supersonic Gas-Liquid Cleaning Systems for Removal of Surface Contaminants
• Chapter 19: Applications of Water Ice Blasting for Removal of Surface Contaminants
• Chapter 20: Applications of Projectiles for Nonaqueous Cleaning of Interior Surfaces of Tubes
• Index