An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

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Yes, you can access Thin Film Materials Technology by Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Materials Science. We have over one million books available in our catalogue for you to explore.

Information

Publisher

William Andrew

Year

2004

ISBN

9780815519317

Topic

Technology & Engineering

Subtopic

Materials Science

Index

Technology & Engineering

Cover image
Title page
Table of Contents
Copyright
Related Electronic Materials and Process Technology
Preface
Chapter 1: Thin Film Materials and Devices
Chapter 2: Thin Film Processes
Chapter 3: Sputtering Phenomena
Chapter 4: Sputtering Systems
Chapter 5: Deposition of Compound Thin Films
Chapter 6: Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films
Chapter 7: Microfabrication by Sputtering
Appendix
List of Acronyms
Index