Handbook of Thin Film Deposition
eBook - ePub

Handbook of Thin Film Deposition

Krishna Seshan

  1. 408 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Handbook of Thin Film Deposition

Krishna Seshan

Book details
Table of contents
Citations

About This Book

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films.

  • A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications
  • Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries
  • The new edition takes covers the transition taking place in the semiconductor world from Al/SiO 2 to copper interconnects with low-k dielectrics
  • Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM
  • Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned 'Moore's Law' relating to the technology development cycle in the semiconductor industry

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Information

Publisher
William Andrew
Year
2012
ISBN
9781437778748
Edition
3
Topic
Tecnologia e ingegneria
Subtopic
Ingegneria elettronica e telecomunicazioni

Table of contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Dedication
  5. Copyright
  6. Foreword
  7. Preface
  8. Acknowledgments
  9. About the Editor
  10. List of Contributors
  11. Scaling
  12. Thin Film Deposition, Equipment and Processing
  13. New Applications
  14. Index
Citation styles for Handbook of Thin Film Deposition

APA 6 Citation

[author missing]. (2012). Handbook of Thin Film Deposition (3rd ed.). Elsevier Science. Retrieved from https://www.perlego.com/book/1837651/handbook-of-thin-film-deposition-pdf (Original work published 2012)

Chicago Citation

[author missing]. (2012) 2012. Handbook of Thin Film Deposition. 3rd ed. Elsevier Science. https://www.perlego.com/book/1837651/handbook-of-thin-film-deposition-pdf.

Harvard Citation

[author missing] (2012) Handbook of Thin Film Deposition. 3rd edn. Elsevier Science. Available at: https://www.perlego.com/book/1837651/handbook-of-thin-film-deposition-pdf (Accessed: 15 October 2022).

MLA 7 Citation

[author missing]. Handbook of Thin Film Deposition. 3rd ed. Elsevier Science, 2012. Web. 15 Oct. 2022.