eBook - PDF

Handbook of Chemical Vapor Deposition

Name: Handbook of Chemical Vapor Deposition
Author: Hugh O. Pierson

Principles, Technology and Applications

Hugh O. Pierson,

506 pages
English
PDF
Available on iOS & Android

eBook - PDF

Handbook of Chemical Vapor Deposition

Principles, Technology and Applications

Hugh O. Pierson,

Book details

Table of contents

Citations

About This Book

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

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Information

Publisher

William Andrew

Year

1999

ISBN

9780815517436

Edition

Topic

Technology & Engineering

Subtopic

Chemical & Biochemical Engineering

Index

Technology & Engineering

Front Cover
Handbook of Chemical Vapor Depostion (CVD): Principles, Technology, and Applications
Copyright Page
Contents
Chapter 1. Introduction and General Considerations
Chapter 2. Fundamentals of Chemical Vapor Deposition
Chapter 3. The Chemistry of CVD
Chapter 4. Metallo-Organic CVD (MOCVD)
Chapter 5. CVD Processes and Equipment
Chapter 6. The CVD of Metals
Chapter 7. The CVD of the Allotropes of Carbon
Chapter 8. The CVD of Non-Metallic Elements
Chapter 9. The CVD of Ceramic Materials: Carbides
Chapter 10. The CVD of Ceramic Materials: Nitrides
Chapter 11. The CVD of Ceramic Materials: Oxides
Chapter 12. The CVD of Ceramic Materials: Borides, Silicides, III…V Compounds and II…VI Compounds (Chalcogenides)
Chapter 13. CVD in Electronic Applications: Semiconductors
Chapter 14. CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers
Chapter 15. CVD in Optoelectronic and Ferroelectric Applications
Chapter 16. CVD in Optical Applications
Chapter 17. CVD in Wear-and Corrosion-Resistant Applications
Chapter 18. CVD in Cutting-Tool Applications
Chapter 19. CVD in Fiber, Powder, and Monolithic Applications
Conversion Guide
Appendix: Alternative Processes for Thin-Film Deposition and Surface Modification
Index