Ion Implantation Science and Technology
eBook - PDF

Ion Implantation Science and Technology

  1. 508 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Ion Implantation Science and Technology

Book details
Table of contents
Citations

About This Book

Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, and machines involved in the subject. The book is divided into two parts - Part 1: Ion Implantation Science and Part 2: Ion Implantation Technology. Part 1 covers topics such as the stopping and range of ions in solids; ion implantation damage in silicon; experimental annealing and activation; and the measurement on ion implantation. Part 2 includes ion optics and focusing on implanter design; photoresist problems and particle contamination; ion implantation diagnostics and process control; and emission of ionizing radiation from ion implanters. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

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Yes, you can access Ion Implantation Science and Technology by J.F. Ziegler in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Atomic & Molecular Physics. We have over one million books available in our catalogue for you to explore.

Information

Publisher
Academic Press
Year
2012
ISBN
9780323161657
Edition
2
Topic
Physical Sciences
Subtopic
Atomic & Molecular Physics

Table of contents

  1. Front Cover
  2. Ion Implantation Science and Technology: Second Edition
  3. Copyright Page
  4. Table of Contents
  5. Contributors
  6. Preface
  7. Part I: Ion Implantation Science
  8. Part II: Ion Implantation Technology
  9. INDEX