Micromachining Techniques for Fabrication of Micro and Nano Structures
eBook - PDF

Micromachining Techniques for Fabrication of Micro and Nano Structures

  1. 314 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Micromachining Techniques for Fabrication of Micro and Nano Structures

Book details
Table of contents
Citations

About This Book

Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.

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Yes, you can access Micromachining Techniques for Fabrication of Micro and Nano Structures by Mojtaba Kahrizi in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Analytic Chemistry. We have over one million books available in our catalogue for you to explore.

Information

Publisher
IntechOpen
Year
2012
ISBN
9789535160953
Topic
Physical Sciences
Subtopic
Analytic Chemistry

Table of contents

  1. Micromachining Techniques for Fabrication of Micro and Nano Structures
  2. Contents
  3. Preface
  4. Chapter 1 Focused Ion Beam Based Three-Dimensional Nano-Machining
  5. Chapter 2 Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining
  6. Chapter 3 Fundamentals of Laser Ablation of the Materials Used in Microfluiducs
  7. Chapter 4 Microwave Meta-Material Absorbers Utilizing Laser Micro-Machining Technology
  8. Chapter 5 Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser
  9. Chapter 6 Laser Ablation for Polymer Waveguide Fabrication
  10. Chapter 7 Micro Eletro Discharge Milling for Microfabrication
  11. Chapter 8 Mechanical Micromachining by Drilling, Milling and Slotting
  12. Chapter 9 Release Optimization of Suspended Membranes in MEMS
  13. Chapter 10 Micro Abrasive-Waterjet Technology
  14. Chapter 11 Electrochemical Spark Micromachining Process
  15. Chapter 12 Integrated MEMS: Opportunities & Challenges
  16. Chapter 13 Modeling and Simulation of MEMS Components: Challenges and Possible Solutions