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- English
- PDF
- Available on iOS & Android
eBook - PDF
Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography
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Table of contents
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About This Book
This SPIE Spotlight focuses on the micro-/nano-structuring aspects of focused ion beam (FIB) instrumentation. It is designed as a tutorial with examples of real structures of increasing complexity. Readers with no previous experience with FIB/SEM instrumentation can quickly grasp the basics of ion/matter interactions, surface modification methods, initial alignment and structuring, fabrication of various micro-optic elements, and an outlook of up-and-coming FIB technologies.
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Yes, you can access Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography by Keskinbora, Kahraman in PDF and/or ePUB format, as well as other popular books in Technik & Maschinenbau & Elektrotechnik & Telekommunikation. We have over one million books available in our catalogue for you to explore.
Information
Table of contents
- Copyright
- Series page
- Preface
- 1 Introduction
- 2 Micro-/Nano-Optics Prototyping Case Studies
- 3 Outlook
- 4 Summary and Conclusions
- Acknowledgments
- References
- Author biography