Principles of Plasma Discharges and Materials Processing
eBook - PDF

Principles of Plasma Discharges and Materials Processing

Michael A. Lieberman, Alan J. Lichtenberg

  1. English
  2. PDF
  3. Available on iOS & Android
eBook - PDF

Principles of Plasma Discharges and Materials Processing

Michael A. Lieberman, Alan J. Lichtenberg

Book details
Table of contents
Citations

About This Book

A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include:
* Updated cross sections
* Diffusion and diffusion solutions
* Generalized Bohm criteria
* Expanded treatment of dc sheaths
* Langmuir probes in time-varying fields
* Electronegative discharges
* Pulsed power discharges
* Dual frequency discharges
* High-density rf sheaths and ion energy distributions
* Hysteresis and instabilities
* Helicon discharges
* Hollow cathode discharges
* Ionized physical vapor deposition
* Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

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Information

Publisher
Wiley-Interscience
Year
2005
ISBN
9780471724247
Edition
2
Topic
Physical Sciences
Subtopic
Physics
Index
Physics

Table of contents

  1. PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
Citation styles for Principles of Plasma Discharges and Materials Processing

APA 6 Citation

Lieberman, M., & Lichtenberg, A. (2005). Principles of Plasma Discharges and Materials Processing (2nd ed.). Wiley. Retrieved from https://www.perlego.com/book/2766249/principles-of-plasma-discharges-and-materials-processing-pdf (Original work published 2005)

Chicago Citation

Lieberman, Michael, and Alan Lichtenberg. (2005) 2005. Principles of Plasma Discharges and Materials Processing. 2nd ed. Wiley. https://www.perlego.com/book/2766249/principles-of-plasma-discharges-and-materials-processing-pdf.

Harvard Citation

Lieberman, M. and Lichtenberg, A. (2005) Principles of Plasma Discharges and Materials Processing. 2nd edn. Wiley. Available at: https://www.perlego.com/book/2766249/principles-of-plasma-discharges-and-materials-processing-pdf (Accessed: 15 October 2022).

MLA 7 Citation

Lieberman, Michael, and Alan Lichtenberg. Principles of Plasma Discharges and Materials Processing. 2nd ed. Wiley, 2005. Web. 15 Oct. 2022.