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Thin Films: Heteroepitaxial Systems
About This Book
Heteroepitaxial films are commonplace among today's electronic and photonic devices. The realization of new and better devices relies on the refinement of epitaxial techniques and improved understanding of the physics underlying epitaxial growth. This book provides an up-to-date report on a wide range of materials systems. The first half reviews metallic and dielectric thin films, including chapters on metals, rare earths, metal-oxide layers, fluorides, and high-Tc superconductors. The second half covers semiconductor systems, reviewing developments in group-IV, arsenide, phosphide, antimonide, nitride, II-VI and IV-VI heteroepitaxy. Topics important to several systems are covered in chapters on atomic processes, ordering and growth dynamics.
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Table of contents
- Contents
- Preface
- Chapter 1 Atomic Interactions and Surface Processes in Heteroepitaxy
- Chapter 2 Ordering in III-V Semiconductor Alloys
- Chapter 3 Transition Metal Thin Film Epitaxy
- Chapter 4 The Growth and Structure of Epitaxial Metal-Oxide/Metal Interfaces
- Chapter 5 Heteroepitaxy of Disparate Materials: From Chemisorption to Epitaxy in CaF2/Si(111)
- Chapter 6 Recent Progress in High Tc Superconducting Heterostructures
- Chapter 7 Strain Accommodation and Relief in GeSi/Si Heteroepitaxy
- Chapter 8 Heteroepitaxial Growth Modes and Morphologies on GaAs Surfaces
- Chapter 9 Molecular Beam Epitaxy of Sb-based Semiconductors
- Chapter 10 P-Based Semiconductor Multilayers
- Chapter 11 MBE Growth of Wide-Gap Refractory Nitride Epitaxial Films
- Chapter 12 Epitaxial Growth, Microstructural Characterizations, and Optical Physics of Wide Bandgap II-VI Heterostructures
- Chapter 13 Molecular Beam Epitaxy of Narrowgap IV-VI Semiconductors