Semiconductor Manufacturing Technology
eBook - PDF

Semiconductor Manufacturing Technology

  1. 484 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Semiconductor Manufacturing Technology

Book details
Table of contents
Citations

About This Book

This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

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Yes, you can access Semiconductor Manufacturing Technology by Chue San Yoo in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Information

Publisher
WSPC
Year
2008
ISBN
9789813106710
Topic
Technology & Engineering
Subtopic
Electrical Engineering & Telecommunications
Index
Technology & Engineering

Table of contents

  1. Contents
  2. PREFACE
  3. ACKNOWLEDGMENTS
  4. 1. OVERVIEW
  5. 2. BUILDING BLOCKS FOR INTEGRATED CIRCUITS
  6. 3. THERMAL OXIDATION
  7. 4. GAS KINETICS AND PLASMA PHYSICS
  8. 5. CHEMICAL VAPOR DEPOSITION
  9. 6. PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION AND ETCHING
  10. 7. PATTERN TRANSFER: PHOTOLITHOGRAPHY
  11. 8. PATTERN GENERATION
  12. 9. DOPING TECHNOLOGY
  13. 10. METALLIZATION AND SILICIDATION
  14. 11. PLANARIZATION AND CMP TECHNOLOGY
  15. 12. COPPER AND LOW-k
  16. GLOSSARY
  17. REFERENCES
  18. INDEX